Control of Manufacturing Processes (M-I-T)

• Introduction — Processes and Variation Framework
• Semiconductor Process Variation
• Mechanical Process Variation
• Probability Models of Manufacturing Processes
• Sampling Distributions and Statistical Hypotheses
• Shewhart SPC and Process Capability
• Process Capability and Alternative SPC Methods
• Advanced and Multivariate SPC
• Yield Modeling
• Introduction to Analysis of Variance
• Full Factorial Model
• Modeling Testing and Fractional Factorial Models
• Aliasing and Higher Order Models
• Response Surface Modeling and Process Optimization
• Process Robustness
• Nested Variance Components
• Sequential Experimentation
• Case Study 1 Tungsten CVD DOE RSM
• Case Study 2 Cycle to Cycle Control
• Case Study 3 Spatial Modeling
• Case Study 4 Modeling the Embossing Imprinting of Thermoplastic Layers